Understanding defects in CHIPS flow hexagonal arrays and strategies for improvement

Singh, ArjunArjunSinghLee, JongsuJongsuLeeNam, JaewooJaewooNamChan, BTBTChanGronheid, RoelRoelGronheid2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27324Understanding defects in CHIPS flow hexagonal arrays and strategies for improvementProceedings paperhttp://www.dsasymposium.org/index.php/program/dsa-proceedings