Grella, LucaLucaGrellaCarroll, AlanAlanCarrollMurray, KirkKirkMurrayMcCord, Mark A.Mark A.McCordTong, William M.William M.TongBrodie, Alan D.Alan D.BrodieGubiotti, ThomasThomasGubiottiSun, FugeFugeSunKidwingira, FrancoiseFrancoiseKidwingiraKojima, ShinichiShinichiKojimaPetric, PaulPaulPetricBevis, Christopher F.Christopher F.BevisVereecke, BartBartVereeckeHaspeslagh, LucLucHaspeslaghMane, Anil U.Anil U.ManeElam, Jeffrey W.Jeffrey W.Elam2021-10-212021-10-2120131537-1646https://imec-publications.be/handle/20.500.12860/22430Digital pattern generator: an electron-optical MEMS for massively parallel reflective electron beam lithographyJournal article10.1117/1.JMM.12.3.031107http://nanolithography.spiedigitallibrary.org/article.aspx?articleid=1724607