Point defect reactions in silicon studied in situ by high flux electron irradiation in high voltage transmission electron microscope

Vanhellemont, JanJanVanhellemontRomano, AlbertAlbertRomanoFedina, L.L.FedinaVan Landuyt, J.J.Van LanduytAseev, A.A.Aseev2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/975Point defect reactions in silicon studied in situ by high flux electron irradiation in high voltage transmission electron microscopeJournal article