Investigation of correlations between parameters defining the state of sputtered particles

Vlekken, J.J.VlekkenCroes, KrisKrisCroesD'Olieslaeger, MarcMarcD'OlieslaegerKnuyt, G.G.KnuytVandervorst, WilfriedWilfriedVandervorstDe Schepper, LucLucDe Schepper2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/3130Investigation of correlations between parameters defining the state of sputtered particlesProceedings paper