Impact of Externally Induced Local Mechanical Stress on Electrical Performance of Decananometer MOSFETs

Lee, KookjinKookjinLeeKaczer, BenBenKaczerKruv, AnastasiiaAnastasiiaKruvGonzalez, MarioMarioGonzalezEneman, GeertGeertEnemanOkudur, Oguzhan OrkutOguzhan OrkutOkudurGrill, AlexanderAlexanderGrillDe Wolf, IngridIngridDe Wolf2023-05-162022-08-082023-05-1620220018-9383WOS:000833044700001https://imec-publications.be/handle/20.500.12860/40232Impact of Externally Induced Local Mechanical Stress on Electrical Performance of Decananometer MOSFETsJournal article10.1109/TED.2022.3193023WOS:000833044700001BALLISTIC TRANSPORTMOBILITY