Agarwal Kumar, TarunTarunAgarwal KumarSzabo, AronAronSzaboGarcia Bardon, MarieMarieGarcia BardonSoree, BartBartSoreeRadu, IulianaIulianaRaduRaghavan, PraveenPraveenRaghavanLuisier, MathieuMathieuLuisierDehaene, WimWimDehaeneHeyns, MarcMarcHeyns2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27720Benchmarking of monolithic 3D integrated MX2 FETs with Si FinFETsProceedings paper