Influence of elastic scattering of photoelectrons on angle-resolved x-ray photoelectron spectroscopy

Kimura, KenjiKenjiKimuraNakajima, KaoruKaoruNakajimaConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162007-09https://imec-publications.be/handle/20.500.12860/12401Influence of elastic scattering of photoelectrons on angle-resolved x-ray photoelectron spectroscopyJournal article