Adelmann, ChristophChristophAdelmannMeersschaut, JohanJohanMeersschautRagnarsson, Lars-AkeLars-AkeRagnarssonConard, ThierryThierryConardFranquet, AlexisAlexisFranquetSengoku, NaohisaNaohisaSengokuOkuno, YasutoshiYasutoshiOkunoFavia, PaolaPaolaFaviaBender, HugoHugoBenderZhao, ChaoChaoZhaoOSullivan, barrybarryOSullivanRothschild, AudeAudeRothschildSchram, TomTomSchramKittl, JorgeJorgeKittlVan Elshocht, SvenSvenVan ElshochtDe Gendt, StefanStefanDe GendtLehnen, PeerPeerLehnenBoissière, OlivierOlivierBoissièreLohe, ChristophChristophLohe2021-10-172021-10-1720090021-8979https://imec-publications.be/handle/20.500.12860/14868Thermally-stable high effective work function TaCN thin films for metal gate electrode applicationsJournal articlehttp://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JAPIAU000105000005053516000001&idtype=cvips&gifs=Yes