Trager-Cowan, C.C.Trager-CowanMcColl, D.D.McCollSweeney, F.F.SweeneyGrimson, S. T. F.S. T. F.GrimsonTreguer, J. F.J. F.TreguerMohammed, A.A.MohammedMiddleton, P. G.P. G.MiddletonManson-Smith, S. K.S. K.Manson-SmithO'Donnell, K. P.K. P.O'DonnellVan der Stricht, WimWimVan der StrichtMoerman, IngridIngridMoermanDemeester, PietPietDemeesterWu, Ming FangMing FangWuVantomme, AndreAndreVantommeZubia, D.D.ZubiaHersee, S. D.S. D.Hersee2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4797Probing nitride thin films in 3-dimensions using a variable energy electron beamJournal articlehttp://nsr.mij.mrs.org/5S1/W5.10/