Wilson, ChrisChrisWilsonCroes, KristofKristofCroesTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyerHorsfall, A.A.HorsfallNeill, A.A.Neill2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18357Design and application of a sensor to monitor stress in deep submicron copper interconnectsProceedings paper