CMOS technology development vehicle for bulk FinFET N10/N7

Dehan, MorinMorinDehanBoemmels, JuergenJuergenBoemmelsHoriguchi, NaotoNaotoHoriguchiVan der Plas, GeertGeertVan der Plas2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22243CMOS technology development vehicle for bulk FinFET N10/N7Oral presentation