A new way to selectively remove Si islands from polycrystalline silicon seed layers made by aluminium-induced crystallization

Van Gestel, DriesDriesVan GestelGordon, IvanIvanGordonVerbist, AgnesAgnesVerbistCarnel, LodewijkLodewijkCarnelBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmans2021-10-172021-10-1720080040-6090https://imec-publications.be/handle/20.500.12860/14642A new way to selectively remove Si islands from polycrystalline silicon seed layers made by aluminium-induced crystallizationJournal articlehttp://www.sciencedirect.com/science?_ob=ArticleURL&_udi=B6TW0-4RDR180-D&_user=799533&_coverDate=08%2F30%2F2008&_alid=823070372&