Improved surface cleaning by in situ hydrogen plasma for amorphous/crystalline silicon heterojunction solar cells

Granata, StefanoStefanoGranataBearda, TwanTwanBeardaDross, FredericFredericDrossGordon, IvanIvanGordonPoortmans, JefJefPoortmansMertens, PaulPaulMertens2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22426Improved surface cleaning by in situ hydrogen plasma for amorphous/crystalline silicon heterojunction solar cellsProceedings paper