Inoue, FumihiroFumihiroInouePeng, LanLanPengIacovo, SerenaSerenaIacovoPhommahaxay, AlainAlainPhommahaxayVerdonck, PatrickPatrickVerdonckMeersschaut, JohanJohanMeersschautDara, PraveenPraveenDaraSleeckx, ErikErikSleeckxMiller, AndyAndyMillerBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2021-10-272021-10-2720192162-8769https://imec-publications.be/handle/20.500.12860/33196Influence of composition of SiCN as interfacial layer on plasma activated direct bondingJournal article10.1149/2.0241906jss