Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuits

Roelkens, GuntherGuntherRoelkensBrouckaert, JoostJoostBrouckaertTaillaert, D.D.TaillaertDumon, PieterPieterDumonBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaetsNotzel, R.R.NotzelSmit, M.M.Smit2021-10-162021-10-162005-12https://imec-publications.be/handle/20.500.12860/11112Integration of InP/InGaAsP photodetectors onto silicon-on-insulator waveguide circuitsJournal article