Impact of RF power and current on RF MEMS shunt capacitive switches

Rottenberg, XavierXavierRottenbergNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-162021-10-162005-06https://imec-publications.be/handle/20.500.12860/11136Impact of RF power and current on RF MEMS shunt capacitive switchesBook chapter