Boron-doped nanocrystalline diamond films deposited under variable methane/hydrogen ratios

Janssens, S.D.S.D.JanssensHaenen, KenKenHaenenWagner, PatrickPatrickWagner2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17318Boron-doped nanocrystalline diamond films deposited under variable methane/hydrogen ratiosMeeting abstract