Schuller, TimTimSchullerHeard, PeterPeterHeardPopa, VeaceslavVeaceslavPopaVolciuc, OleseaOleseaVolciucTiginyanu, IonIonTiginyanuDas, JoJoDasDegroote, StefanStefanDegrooteGermain, MarianneMarianneGermainSarua, AndreiAndreiSaruaKuball, MartinMartinKuball2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16183Surface-charge lithography for the fabrication of gallium nitride based gas sensorsMeeting abstract