Reducing optical losses in focused-ion-beam etched silicon

Schrauwen, JonathanJonathanSchrauwenVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaetsKlein, E.E.KleinAy, F.F.AyHopman, W.W.HopmanDe Ridder, R.R.De Ridder2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14451Reducing optical losses in focused-ion-beam etched siliconOral presentation