Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si

Hantschel, ThomasThomasHantschelPawlak, B.J.B.J.PawlakCowern, N.E.B.N.E.B.CowernAhn, C.C.AhnVandervorst, WilfriedWilfriedVandervorstGwilliam, R.R.Gwilliamvan Berkum, J.G.M.J.G.M.van Berkum2021-10-222021-10-2220140003-6951https://imec-publications.be/handle/20.500.12860/23904Local traps as nanoscale reaction-diffusion probes: B clustering in c-SiJournal articlehttp://scitation.aip.org/content/aip/journal/apl/105/22/10.1063/1.4902972