NBTI in Si0.55Ge0.45 cladding p-FinFETs: porting the superior reliability from planar to 3D architectures

Franco, JacopoJacopoFrancoKaczer, BenBenKaczerRoussel, PhilippePhilippeRousselBury, ErikErikBuryMertens, HansHansMertensRitzenthaler, RomainRomainRitzenthalerGrasser, T.T.GrasserHoriguchi, NaotoNaotoHoriguchiThean, AaronAaronTheanGroeseneken, GuidoGuidoGroeseneken2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25277NBTI in Si0.55Ge0.45 cladding p-FinFETs: porting the superior reliability from planar to 3D architecturesProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7112694