Catalyst assisted low temperature pre epitaxial cleaning for Si and SiGe surfaces

Dhayalan, Sathish KumarSathish KumarDhayalanLoo, RogerRogerLooHikavyy, AndriyAndriyHikavyyRosseel, ErikErikRosseelWostyn, KurtKurtWostynKenis, KarineKarineKenisShimura, YosukeYosukeShimuraProfijt, HaraldHaraldProfijtMaes, JanJanMaesDouhard, BastienBastienDouhardVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25211Catalyst assisted low temperature pre epitaxial cleaning for Si and SiGe surfacesProceedings paperhttp://www.scientific.net/SSP.219.16