Comparison of techniques to characterise the density, porosity and elastic modulus of porous low-K SiO2 xerogel films

Murray, C.C.MurrayFlannery, C.C.FlanneryStreiter, I.I.StreiterSchulz, S. E.S. E.SchulzBaklanov, MikhaïlMikhaïlBaklanovMogilnikov, K. P.K. P.MogilnikovHimcinschi, C.C.HimcinschiFriedrich, M.M.FriedrichZahn, D. R. T.D. R. T.ZahnGessner, T.T.Gessner2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6632Comparison of techniques to characterise the density, porosity and elastic modulus of porous low-K SiO2 xerogel filmsJournal article