Ozone-based atomic layer deposition of Gd2O3 from tris(isopropyl-cyclopentadienyl) gadolinium: growth characteristics and surface chemistry

Han, Jeong HwanJeong HwanHanDelabie, AnneliesAnneliesDelabieFranquet, AlexisAlexisFranquetConard, ThierryThierryConardVan Elshocht, SvenSvenVan ElshochtAdelmann, ChristophChristophAdelmann2021-10-222021-10-222015-120948-1907https://imec-publications.be/handle/20.500.12860/25358Ozone-based atomic layer deposition of Gd2O3 from tris(isopropyl-cyclopentadienyl) gadolinium: growth characteristics and surface chemistryJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/cvde.201507196/abstract