Determining the oxygen detection limit with magnetic sector dynamic secondary ion mass spectrometry (SIMS)

Merkulov, AlexAlexMerkulov2024-04-082023-07-302024-04-0820232166-2746WOS:001021560500001https://imec-publications.be/handle/20.500.12860/42246Determining the oxygen detection limit with magnetic sector dynamic secondary ion mass spectrometry (SIMS)Journal article10.1116/6.0002578WOS:001021560500001CARBON