Vesters, YannickYannickVestersMcClelland, AlexandraAlexandraMcClellandDe Simone, DaniloDaniloDe SimonePopescu, CarmenCarmenPopescuDawson, GuyGuyDawsonRoth, JohnJohnRothTheis, WolfgangWolfgangTheisVandenberghe, GeertGeertVandenbergheRobinson, Alex P. G.Alex P. G.Robinson2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32211Multi-trigger resist patterning with ASML NXE3300 EUV scannerProceedings paperhttps://doi.org/10.1117/12.2297402