An integrated measurement set-up to study the impact of atmosphere on ESD in MEMS

Sangameswaran, SandeepSandeepSangameswaranDe Coster, JeroenJeroenDe CosterCherman, VladimirVladimirChermanLinten, DimitriDimitriLintenScholz, MirkoMirkoScholzThijs, StevenStevenThijsDe Wolf, IngridIngridDe WolfGroeseneken, GuidoGuidoGroeseneken2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17935An integrated measurement set-up to study the impact of atmosphere on ESD in MEMSOral presentation