Thickness dependent frequency and lifetime behaviour of optical phonons in thin AlN films

Pobedinskas, P.P.PobedinskasMortet, V.V.MortetHaenen, KenKenHaenen2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19583Thickness dependent frequency and lifetime behaviour of optical phonons in thin AlN filmsOral presentation