Le, Quoc ToanQuoc ToanLeKesters, ElsElsKestersDecoster, StefanStefanDecosterChan, BTBTChanHolsteyns, FrankFrankHolsteynsDe Gendt, StefanStefanDe Gendt2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25523Characterization of patterned porous dielectrics after plasma patterning and subsequent wet processingMeeting abstract