Dutta, ShibeshShibeshDuttaMoors, KristofKristofMoorsVandemaele, MichielMichielVandemaeleAdelmann, ChristophChristophAdelmann2021-10-252021-10-2520180741-3106https://imec-publications.be/handle/20.500.12860/30660Finite size effects in highly scaled ruthenium interconnectsJournal article10.1109/LED.2017.2788889http://ieeexplore.ieee.org/document/8244288/