O'Callaghan, J.J.O'CallaghanLoi, R.R.LoiMura, E.E.E.E.MuraRoycroft, B.B.RoycroftTrindade, A.J.A.J.TrindadeThomas, K.K.ThomasGocalinska, A.A.GocalinskaPelucchi, E.E.PelucchiZhang, JingJingZhangRoelkens, GuntherGuntherRoelkensBower, C.A.C.A.BowerCorbett, B.B.Corbett2021-10-242021-10-242017-122159-3930https://imec-publications.be/handle/20.500.12860/29099Comparison of InGaAs and InAIAs sacrificial layers for release of InP-based devicesJournal articlehttps://www.osapublishing.org/ome/abstract.cfm?URI=ome-7-12-4408