Van Look, LieveLieveVan LookBekaert, JoostJoostBekaertDe Bisschop, PeterPeterDe BisschopVan de Kerkhove, JeroenJeroenVan de KerkhoveVandenberghe, GeertGeertVandenbergheSchreel, KoenKoenSchreelMenger, JasperJasperMengerSchiffelers, GuidoGuidoSchiffelersKnols, EdwinEdwinKnolsWillekers, RobRobWillekers2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14667Tool-to-tool optical proximity effect matchingProceedings paper