Posada Quijano, GuillermoGuillermoPosada QuijanoCarchon, GeertGeertCarchonNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe Raedt2021-10-172021-10-1720080018-9480https://imec-publications.be/handle/20.500.12860/14338Horizontal integration of cavity filters on high-resistivity silicon thin-film technologyJournal article