Leonov, VladimirVladimirLeonovvan Schaijk, RobRobvan SchaijkVan Hoof, ChrisChrisVan Hoof2021-10-212021-10-2120131530-437Xhttps://imec-publications.be/handle/20.500.12860/22668Charge retention in a patterned SiO2/Si3N4 electretJournal article