Tutunjyan, NinaNinaTutunjyanVan Cauwenberghe, MarcMarcVan CauwenbergheVerdonck, PatrickPatrickVerdonckMajeed, BivraghBivraghMajeedBuisson, ThibaultThibaultBuissonCivale, YannYannCivaleBoullart, WernerWernerBoullart2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18109Dry etch solutions for 3D integration technologyMeeting abstract