Karmarkar, Aditya P.Aditya P.KarmarkarGuo, WeiWeiGuoXu, XiaopengXiaopengXuVan der Plas, GeertGeertVan der PlasVan Huylenbroeck, StefaanStefaanVan HuylenbroeckGonzalez, MarioMarioGonzalezAbsil, PhilippePhilippeAbsilEl Sayed, KarimKarimEl SayedBeyne, EricEricBeyne2021-10-232021-10-2320161530-4388https://imec-publications.be/handle/20.500.12860/26809Performance and reliability impact of copper plasticity in backside TSV-last fabrication processJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7527618