Milenin, AlexeyAlexeyMileninCamerotto, ElisabethElisabethCamerottoSun, NoelNoelSunBoccardi, GuillaumeGuillaumeBoccardiVertommen, JohanJohanVertommenPiumi, DanieleDanielePiumi2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27011III-V fin patterning in SADP schemeMeeting abstracthttp://pesm2016.insight-outside.fr/index.php?langue=en&onglet=11&acces=&idUser=&emailUser=&messageConfirmation=