In-situ HVEM study of dislocation generation in patterned stress fields at silicon surfaces

Vanhellemont, JanJanVanhellemontClaeys, CorCorClaeysVan Landuyt, J.J.Van Landuyt2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/970In-situ HVEM study of dislocation generation in patterned stress fields at silicon surfacesJournal article