Fabrication of plasmonic resonant antennas by FIB and electron beam lithography

Sikola, TomasTomasSikolaKekatpure, R.D.R.D.KekatpureVan Dorpe, PolPolVan DorpePala, R.A.R.A.PalaBartosik, M.M.BartosikTomanec, O.O.TomanecBrongersma, MarkMarkBrongersma2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12897Fabrication of plasmonic resonant antennas by FIB and electron beam lithographyOral presentation