Roggen, JeanJeanRoggenBeyne, EricEricBeyneTruzzi, ClaudioClaudioTruzziRingoot, EdwinEdwinRingootPieters, PhilipPhilipPieters2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2906On thin-film MCM-D interconnectsProceedings paper