Reliability of High Mobility SiGe Channel MOSFETs for Future CMOS Applications

Franco, JacopoJacopoFrancoKaczer, BenBenKaczerGroeseneken, GuidoGuidoGroeseneken2025-01-132025-01-132014978-94-007-7662-3https://imec-publications.be/handle/20.500.12860/45076Reliability of High Mobility SiGe Channel MOSFETs for Future CMOS ApplicationsBook10.1007/978-94-007-7663-0978-94-007-7663-0