Verdonck, PatrickPatrickVerdonckVan Besien, ElsElsVan BesienVanstreels, KrisKrisVanstreelsTrompoukis, ChristosChristosTrompoukisUrbanowicz, AdamAdamUrbanowiczDe Roest, DavidDavidDe RoestBaklanov, MikhaïlMikhaïlBaklanov2021-10-192021-10-1920110021-4922https://imec-publications.be/handle/20.500.12860/20053Influence of the UV cure on advanced plasma enhanced chemical vapour deposition low-k materialsJournal article