Optimization of scatterometry parameters for shallow trench isolation (STI) monitor

Leray, PhilippePhilippeLerayCheng, ShauneeShauneeChengKremer, StephanieStephanieKremerErcken, MoniqueMoniqueErckenPollentier, IvanIvanPollentier2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9190Optimization of scatterometry parameters for shallow trench isolation (STI) monitorProceedings paper