Optimisation of morphology and phosphorus incorporation for electronic grade n-type diamond growth

Nicley, ShannonShannonNicleyRouzbahani, RozitaRozitaRouzbahaniPobedinskas, PauliusPauliusPobedinskasHaenen, KenKenHaenen2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27079Optimisation of morphology and phosphorus incorporation for electronic grade n-type diamond growthOral presentation