Le, Quoc ToanQuoc ToanLeWhelan, CarolineCarolineWhelanStruyf, HerbertHerbertStruyfBender, HugoHugoBenderConard, ThierryThierryConardBrongersma, SywertSywertBrongersmaBoullart, WernerWernerBoullartVanhaelemeersch,VanhaelemeerschMaex, KarenKarenMaex2021-10-152021-10-152004-09https://imec-publications.be/handle/20.500.12860/9186Plasma modification of porous low-k dielectricsJournal article