Trivkovic, DarkoDarkoTrivkovicShi, XuelongXuelongShiTsai, Yi-PeiYi-PeiTsaiChang, Chieh-MiaoChieh-MiaoChangWang, JaneJaneWangMalacara, VictoriaVictoriaMalacaraBaskaran, BalakumarBalakumarBaskaranDrissi, YoussefYoussefDrissiBekaert, JoostJoostBekaertMiyaguchi, KenichiKenichiMiyaguchi2025-08-292025-08-292024978-1-5106-8157-60277-786XWOS:001536747100012https://imec-publications.be/handle/20.500.12860/46131Unfolding the curves: novel designs and metrology methods for curvilinear masks qualificationProceedings paper10.1117/12.3036470978-1-5106-8158-3WOS:001536747100012