Maximizing fabrication and thermal tolerances of all-silicon FIR wavelength filters

Dwivedi, Sarvagya PaavanSarvagya PaavanDwivediD'heer, HerbertHerbertD'heerBogaerts, WimWimBogaerts2021-10-222021-10-222015-041041-1135https://imec-publications.be/handle/20.500.12860/25240Maximizing fabrication and thermal tolerances of all-silicon FIR wavelength filtersJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7029048