Progress towards quantitative high spatial resolution 1D and 2D carrier profiling using scanning probe techniques

Duhayon, NatasjaNatasjaDuhayonEyben, PierrePierreEybenHantschel, ThomasThomasHantschelXu, MingweiMingweiXuClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4983Progress towards quantitative high spatial resolution 1D and 2D carrier profiling using scanning probe techniquesOral presentation