Vandervorst, WilfriedWilfriedVandervorstBrijs, BertBertBrijsBender, HugoHugoBenderConard, ThierryThierryConardPetry, JasmineJasminePetryRichard, OlivierOlivierRichardBlasco, X.X.BlascoNafría, M.M.Nafría2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8319Critical metrology for ultrathin high k dielectricsProceedings paper