Quantitative characterization of pore stuffing and unstuffing for postporosity plasma protection of low-k materials

Heyne, MarkusMarkusHeyneZhang, LipingLipingZhangLiu, JunjunJunjunLiuAhmad, IftikharIftikharAhmadToma, DorelDorelTomade Marneffe, Jean-FrancoisJean-Francoisde MarneffeDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-2220141071-1023https://imec-publications.be/handle/20.500.12860/23930Quantitative characterization of pore stuffing and unstuffing for postporosity plasma protection of low-k materialsJournal articlehttp://scitation.aip.org/content/avs/journal/jvstb/32/6/10.1116/1.4896759